Denka TFE Filaments
Denka TFE (Thermal Field Emission) filaments are zirconium-doped tungsten (ZrO/W) emitters designed for high-resolution electron microscopy.
These emitters provide roughly 100 times higher brightness than standard Lanthanum Hexaboride (LaB6) cathodes, making them ideal for semiconductor inspection and electron beam lithography.
Technical Specifications
TFE modules typically consist of an emitter, suppressor, and extractor.
- Operating Temperature: Recommended at 1800K (Max ≤ 1850K)
- Filament Current: Typically ≤ 2.6A at 1800K
- Operating Pressure: Recommended ≤ 2.7×10⁻⁷ Pa (2×10⁻⁹ Torr) for optimal performance
- Tip Radius: Standard options range from 0.3 to 0.9µm.
The Denka TFE Emmiters are available at economic pricing.
Use for FEG Scanning Electron Microscopes (SEM) and FEG Transmitted Electron Microscopes (TEM)
